Optical micro-shadowgraph-based method for measuring micro-solderball height

Microactuated Micro-xyz Stages for Free-space Micro-optical Bench

A novel microactuated micro-XYZ stage with large travel distance and fine positioning capability has been demonstrated using the surface-micromachming technology. The micro-XYZ stage consists of three inplane translation stages driven by integrated scratch drive actuators. Two vertically stacked 45" micromirrors in orthogonal directions are employed to achieve vertical beam adjustment without u...

Modelling optical micro-machines

X iv :p hy si cs /0 60 72 86 v1 [ ph ys ic s. op tic s] 3 0 Ju l 2 00 6 Preprint of: Vincent L. Y. Loke, Timo A. Nieminen, Agata M. Brańczyk, Norman R. Heckenberg and Halina Rubinsztein-Dunlop “Modelling optical micro-machines” pp. 163–166 in Nikolai Voshchinnikov (ed.) 9th International Conference on Electromagnetic and Light S cattering by Non-Spherical Particles: Theory, Measurements, and Ap...

Low-Temperature Bonding for Silicon-Based Micro-Optical Systems

Silicon-based integrated systems are actively pursued for sensing and imaging applications. A major challenge to realize highly sensitive systems is the integration of electronic, optical, mechanical and fluidic, all on a common platform. Further, the interface quality between the tiny optoelectronic structures and the substrate for alignment and coupling of the signals significantly impacts th...

Micro-resonators based on integrated polymer technology for optical sensing

Research on sensors has experienced a noticeable development over the last decades especially in label free optical biosensors. However, compact sensors without markers for rapid, reliable and inexpensive detection of various substances induces a significant research of new technological solutions. The context of this work is the development of a sensor based on easily integrated and inexpensiv...

Assembly Solutions for Micro-optical Systems